Electron Beam Sources

Fraunhofer FEP is the only institute of the Fraunhofer Group for Light & Surfaces to develop electron-beam sources for a wide range of applications and requirements. The institute offers services ranging from developing technology and processes to assembling complete package solutions, including technology transfer with the following topics:

• Transferring technology and commissioning of processes in production
• Transferring technology including equipment for key components (also retrofit existing systems)
• Scaling up of processes and technologies for industrial plants
• Creating complete package solutions including beam control, arc protection, power, beam and deflection generators
• Adapting the electron-beam source to specific customer requirements and development of special solutions
  
• Providing, integrating and adapting optional additional components, for example:
• portable handheld remote control for the electron-beam source
• evaporator-crucible solutions
• static magnetic-beam deflection field
• plasma activation systems
• substrate pretreatment facilities
• substrate bias power supplies
• reactive gas systems
• rate monitor