Optical metrology is widely used to determine different variables such as

  • geometry,
  • speed,
  • type of material and
  • process behavior

thanks to non-contact signal detection.

The range of measurable variables essentially depends on the extent to which the measuring radiation reaches the object to be measured or on the extent to which this object itself emits the radiation back.

The institutes of the Group for Light & Surfaces – ILT, IOF and IPM – conceive and implement optical measuring systems for various applications such as component measurement, process control as well as distance and speed measurement over a large measuring scale ranging from nanometers to kilometers and beyond.

The 3D measuring systems cover a geometrical range so that the geometry and position of objects can be detected; for this purpose, the group is developing special laser scanners and uses them in combination with tailor-made lighting and camera systems. The institutes pay special attention to ensuring that the systems are robust and have a long service life as well as to evaluating data efficiently.

For process and material analysis, spectroscopic measurement methods and systems have mainly been developed in which spectral lines or regions are recorded for the materials and processes to be analyzed, either by laser-generated plasmas or by absorption and emission spectroscopy.

In addition to these basic measuring technology developments, the group’s institutes develop suitable software for industrial and application engineering, which, together with special electronics hardware, provides a fast measurement technology tailored to a specific application.




Interferometric and Holographic Metrology


Spectroscopic Metrology


Image Processing and Process Control