Fraunhofer Group for Light & Surfaces
Coated mirror pair.
Fraunhofer IWS develops prototypes of reactors for surface treatment, such as fine cleaning, functionalization or etching, and for the production of oxide and non-oxide layers, nanoparticles and nanotubes (carbon nanotubes, CNTs) as well as carbon fibers.
To deposit nanometer single and multi-coatings for EUV and X-ray optics, the institute uses magnetron and ion beam sputter deposition as well as pulse laser deposition.
The coating systems meet the highest requirements with regard to coating thickness accuracy, roughness, chemical purity, lateral homogeneity and reproducibility. In addition to developing and producing precision coatings, Fraunhofer IWS has many years of experience in characterizing and modeling nanometer coatings.